Micro- & Nanofabrication

Micro- and nanofabricated platforms where materials, surfaces, structures, fabrication processes, and device performance are tightly coupled.

Fabrication is where the design either holds or it does not. The articles here are about the discipline of getting fabrication processes to deliver predictable devices: etch chemistries, surface engineering, anodic bonding, water purity, cleanroom commissioning, and the lessons that translate from one fab to the next.